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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Cand. Sci. (Eng.), Director of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Article author
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phase-shifting photomask
magnetron sputtering
deep ultraviolet exposure
photolithography
titanium dioxide TiO2
strontium titanate SrTiO3
carbon dioxide CO2
hydrothermal synthesis
nanoscale filaments
catalytic activity
3D printing
surface-enhanced Raman spectroscopy
SERS substrate
Raman spectroscopy
flexible substrate
robocasting
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Investigation of the formation process and stability of Mo-Si and Ta-Si based phase-shifting layers for photomasks under DUV with 248 nm wavelength exposure
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Hydrothermal synthesis of TiO2/SrTiO3 composite nanostructures for photocatalysis application
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Formation and study of flexible SERS substrates by robocasting
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