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Alexandr S. Sivchenko

SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7
Cand. Sci. (Eng.), Design Engineer of the Research Laboratory of Advanced Element Base and Technological Routes of Microelectronics, SMC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Natalia G. Osipenkova

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Kozlitin Aleksey Ivanovich

Cand. Sci. (Phys.-Math.), Head of the High-Technology Center, FSUE F.V. Lukin Physical Problems Research Institute (124460, Moscow, Zelenograd, Georgiyevskiy ave., 5

Egor P. Korchagin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Alexander G. Borisov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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