Persons
Cand. Sci. (Eng.), Head of the Research Laboratory New Technological Processes, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Assoc. Prof. of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Senior Researcher of the Research Laboratory of New Technological Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Alexander V. Rumyantsev
National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Phys.-Math.), Leading Researcher, LLC «NT-MDT» (Russia, 124460, Moscow, Zelenograd, 4922 proezd, 4, build. 3)
Cand. Sci. (Eng.), Head of the Thin Film Deposition Laboratory of JSC «Angstrem» (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, build. 3), Senior Lecturer of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Russia, Moscow, Zelenograd, Shokin sq., 1)