Persons
Dr. Sci. (Eng.), Prof. of the Institute of Nano and Microsystem Technology, National Research University of Electronic Technology (124498, Russia, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Expert of the Research Laboratory of Integrated Technologies,
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Head of Laboratory, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Head of the Microsystem Technology Department, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)