Persons
Cand. Sci. (Eng.), Chief of the sector, JSC «RPC «Istok named after Shokin» (Russia, 141190, Fryazino, Vokzalnaya str., 2A)
PhD student, engineer of the Quantum Physic and Nanoelectronic Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Roman L. Volkov
National Research University of Electronic Technology, Moscow, Russia
Research Assistent of the Center of Shared Research Facilities «Characterization and Modification of Microstructures and nanoobjects», National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)