National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Engineer of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
“Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6); National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dr. Sci. (Eng.), Assoc. Prof. of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology
(Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); General Manager, “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)
Cand. Sci. (Eng.), Leading Engineer of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, “Laboratory of Micro-Devices” LLC (Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6)