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Andrey M. Tarasov

National Research University of Electronic Technology, Moscow, Russia
PhD student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Margarita D. Kruzhalina

National Research University of Electronic Technology, Moscow, Russia
Student, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Ekaterina S. Migunova

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Senior Lecturer of the Institute of Physics and Applied Mathematics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

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Сулимин Александр Дмитриевич

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