Persons

For homogeneity of parameters of dielectrics more and more rigid requirements are claimed, especially while using them in the micro- and radioelectronic items. The purpose of the work is to develop an automated method for monitoring the electrical parameters of planar dielectrics with increased requirements for accuracy and resolution. A short comparative analysis with the available methods for controlling the parameters of solid dielectrics has been carried out. A method for microwave monitoring of the nonhomogeneities of planar dielectrics by the wave characteristics of a scanning microstrip line (MSL) based on the application of the Radon transform has been described. A mathematical model for processing the MSL wave characteristics and for constructing a map of distributing the nonhomogeneities has been presented. The estimates of realizability of the parameters and the limits of the mathematical model applicability have been given. The technical realization of the method has been considered with an example of the installation for monitoring the uniformity of the parameters of planar dielectrics and the results of simulation of the measuring part in the AWR Microwave Office. The estimation of methodical errors, which in case of the dielectric permittivity measurement is on average ±1·10 and of the resolving power, which reaches 0.2 mm according to preliminary calculations, has been carried out. The described method is applicable in the radio-measuring equipment, used in the field of the microwave technology development, microelectronics, production of composite dielectric materials with high repeatability of parameters.

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