Persons
Junior Researcher of the Research Laboratory New Technological Processes, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Head of the Research Laboratory Nanomicroelectromechanical Systems, SMC «Technological Centre» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Research Engineer of the CAD Department, Institute for Design Problems in Microelectronics of Russian Academy of Sciences (Russia, 124365, Moscow, Zelenograd, Sovetskaya st., 3)
Cand. Sci. (Eng.), Head of the Laboratory of Processes and Instruments Reliability, OOO «NM-Tekh» (Russia, 124527, Moscow, Zelenograd, Solnechnaya alleya, 6)
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Process Engineer of the Laboratory of Processes and Instruments Reliability, OOO «NM-Tekh» (Russia, 124527, Moscow, Zelenograd, Solnechnaya alleya, 6)