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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Publication of the journal
Elektronika
Publication of the journal
№3 (95)
Publication 150
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References
The equations for estimation of the true leak rate for the hermiticity testing of microelectronic devices and MEMS have been proposed.
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Anton N. Boiko
National Research University of Electronic Technology, Moscow, Russia
Sergey P. Timoshenkov
National Research University of Electronic Technology, Moscow, Russia
Sergey P. Timoshenkov
Kabardino-Balkarian State University, Nalchik, Russia