The simulation of the primary gas flow rate converter of membrane type based on the operation calorimetric principle has been carried out. Several options of the sensor construction have been considered. The results of numerical modeling for different variants of the sensor design in terms of the maximum sensitivity have been analyzed. The results permit to find the optimal for the moment the thermal sensor configuration and location.
1. Моделирование первичного преобразователя скорости потока газа мембранного типа / В.А. Беспалов,
И.А. Васильев, Н.А. Дюжев и др. // Изв. вузов. Электроника. 2014. №3. С. 5056.
2. Bespalov V.A., Djuzhev N.A., Novikov D.V., Ryabov V.T. Application of the streamlined body for properties amplification of thermoresistive MEMS gas flow sensor // Third Asian School Conference on Physics and Technology of Nanostructured Materials (ASCO Nanomat 2015). August 1926, 2015. URL: ntc.dvo.ru/conf/nanomat 2015 / (дата обращения: 02.07.2015).
3. Дюжев Н.А. Измеритель потока // Пат. России № 2014140442/28. 2015.