The technique of regulating the carbon nanotubes (CNT) concentration includes three stages. At the first stage, prior to the synthesis of nanotubes, the lithographic fragmentation of the catalyst is carried out in combination with its formation using «phase separation», «fragmentation» by dilution with a non-reactive metal, regulation of duration of the electrochemical deposition of catalyst, or the strain-engineered manufacturing of the catalyst for self-aligned CNT arrays growing. At the second stage it is required to use special conditions of a carbon nanotubes synthesis, which leads to formation of sparse arrays of CNTs. The third stage is used, if necessary, and involves the laser-assisted processing of the CNT forests or laser-assisted simultaneous transfer and patterning of CNT arrays using the polymer substrates. Depending on the tasks and technological capabilities, other combinations of the described methods are also allowed. The importance of controlling the CNT concentration in the integrated circuits composite metallization, formed by the electrochemical methods, has been shown. The explanation has been given in terms of technology capabilities and desired material properties. Both variants of the electrochemical formation of composites, such as the deposition of copper in the pre-grown CNT arrays or simultaneous co-deposition of copper and nanotubes have been touched upon.
Литература
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