The gas damping influence on bandwidth of the pendulum microaccelerometers has been investigated. It has been found that to increase the bandwidth, it is necessary to provide residual pressure of not higher than 1-5ּ10-1 torr inside the packaged device. This condition can be reached by using the developed technology of the glass-to-metal encapsulation.
Anton N. Boiko
National Research University of Electronic Technology, Moscow, Russia
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