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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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porous silicon
Pt particles
Pt-assisted chemical etching
resistivity
metal-stimulated chemical etching
resistive gas sensors
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Silicon wafers conductivity type and resistivity effect on the morphology of the porous layer formed with Pt-assisted chemical etching
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Investigation of the reactive capability of the por-Si/Pd structure to the ethanol vapors
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