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Nikita M. Zhilo

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Engineer of the Institute of Biomedical Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Alexander A. Baranov

Central Scientific-Research Institute of Chemistry and Mechanics, Russia, 115487, Moscow, Nagatinskaya st., 16a
Cand. Sci. (Eng.), Head of the Laboratory, Central Research Institute of Chemistry and Mechanics (Russia, 115487, Moscow, Nagatinskaya st., 16a)

Paing Soe Thu

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Andrey P. Solodovnikov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Institute of Micro-Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Anton V. Bukarev

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Candidate of the Academic Degree of Candidate of Sciences of the Institute of System and Software Engineering and Information Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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