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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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MEMS comb type acceleration sensor
capacitance changes
sensitive element
linear acceleration
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Modeling and optimization of MEMS comb type capacitive acceleration sensor
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