Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika home

Publication of the journal

The section is currently being updated

Micromechanical accelerometers (MMA) have featured compact size, low power consumption, high sensitivity and low cost. Depending on the mechanism by which displacement is converted under the acceleration, MMA are divided into several types, including capacitive, resonant, piezoelectric, piezoresistive, optical, tunneling and thermal accelerometers. The study results of sensitive element of the capacitive comb type MMA were presented in this work. The mechanical deformation of the sensitive element design along the X and Y axes and thermal deformation results along the X axis, which affect the change in capacitance between the comb electrodes under the acceleration of 50 g, were studied. The sensitive element design of capacitive type MMA was simulated using the softwares of SolidWorks, Ansys and Ansys Maxwell. It was found that the developed design of capacitive type MMA with 70 pairs of electrodes is operational.

Key words: sensitive element, micromechanical accelerometer, mechanical stress, resonant frequencies, change in capacitance
Published in: MICRO- AND NANOSYSTEM TECHNOLOGY
Bibliography link: Paing Soe Thu, Kalugin V. V., Kochurina E. S. Study of the sensitive element of micromechanical accelerometer under the temperature effects. Izv. vuzov. Elektronika = Proc. Univ. Electronics. 2026;31(4):438–447. (In Russ.). DOI: 10.24151/1561-5405-2026-31-4-438-447.WOJEBR

Paing Soe Thu
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1

Viktor V. Kalugin
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1

Elena S. Kochurina
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; “Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 10, bld. 1

1. Kang R., Xiaoli W., Zhang S., Mengqi Z., Chenyuan H., Huafeng L., Tu L.-C. A MEMS micro-g capacitive accelerometer based on through-silicon-wafer-etching process. Micromachines. 2019;10(6):380. https://doi.org/10.3390/mi10060380

2. Hanasi P., Sheeparamatti B. G., Abbigeri V., Meti N. Study of capacitance in electrostatic comb-drive actuators: Excerpt from the Proceedings of the 2015 COMSOL Conference in Pune. COMSOL. 2015. Available at: https://www.comsol.com/paper/study-of-capacitance-in-electrostatic-comb-drive-actuators-27091 (accessed: 22.05.2023).

3. Paing Soe Thu, Kalugin V. V., Kochurina E. S., Thu Ta. Structural design and modeling of MEMS-based single axis capacitive accelerometer. In: 2024 Conference of Young Researchers in Electrical and Electronic Engineering (EICon). St. Petersburg: IEEE; 2024, pp. 559–564. https://doi.org/10.1109/ElCon61730.2024.10468256

4. Bedekar V. N., Tantawi Kh. H. MEMS sensors and actuators. In: Advanced Mechatronics and MEMS Devices II. Microsystems and Nanosystems. Eds D. Zhang, B. Wei. Cham: Springer; 2017, pp. 195–216. https://doi.org/10.1007/978-3-319-32180-6_10

5. Калугин В. В., Пайн Со Хту, Пьо Вин Тун, Калугина И. В. Разработка МЭМС акселерометра емкостного типа. СВЧ-техника и телекоммуникационные технологии. 2022;(4):249–250. EDN: BWUSZV.

Kalugin V. V., Paing Soe Thu, Phyo Win Tun, Kalugina I. V. Capacitive-type MEMS accelerometer design. SVCh-tekhnika i telekommunikatsionnyye tekhnologii = Microwave & Telecommunication Technology. 2022;(4):249–250. (In Russ.).

6. Кремний. Tydex. Available at: https://www.tydexoptics.com/pdf/ru/Silicon_ru.pdf (accessed: 14.05.2026).

Silicon. Tydex. Available at: http://tydexoptics.com/materials1/for_transmission_optics/silicon/ (accessed: 21.02.2022).

7. Пайн Со Хту, Калугин В. В., Кочурина Е. С., Йе Мин Хлаинг. Исследование чувствительного элемента микромеханического акселерометра в условиях температурных воздействий. In: Интеллектуальные системы и микросистемная техника: сб. трудов Науч.-практ. конф. (Кабардино-Балкария, пос. Эльбрус, 30 янв. – 04 февр. 2025 г.). М.: МИЭТ; 2025, с. 51–58. EDN: TTZATD.

Paing Soe Thu, Kalugin V., Kochurina E., Ye Min Hlaing. Study of the sensitive element of a micromechanical accelerometer under the temperature influences. In: Intellektualnyye sistemy i mikrosistemnaya tekhnika = Intelligent systems and microsystem engineering: proc. of the Res.-to-pract. conf. (Kabardino-Balkariya, Elbrus vge., Jan. 30 – Feb. 04, 2025). Moscow: MIET; 2025, pp. 51–58. (In Russ.).

8. Вавилов В. Д., Тимошенков С. П., Тимошенков А. С. Микросистемные датчики физических величин: монография: в 2 ч. М.: Техносфера; 2018. 549 с.

Vavilov V. D., Timoshenkov S. P., Timoshenkov A. S. Microsystem Sensors of Physical Quantities: monograph: in 2 parts. Moscow: Tekhnosfera Publ.; 2018. 549 p. (In Russ.).

9. Abarca-Jiménez G. S., Reyes-Barranca M. A., Mendoza-Acevedo S., Munguía-Cervantes J. E., Alemán-Arce M. A. Modal analysis of a structure used as a capacitive MEMS accelerometer sensor. In: 2014 11th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE). Ciudad del Carmen: IEEE; 2014, pp. 422–425. https://doi.org/10.1109/ICEEE.2014.6978263

10. Le X. L., Kim K., Choa S.-H. Analysis of temperature stability and change of resonant frequency of a capacitive MEMS accelerometer. Int. J. Precis. Eng. Manuf. 2022;23:347–359. https://doi.org/10.1007/s12541-021-00602-1

Information about the publication

Downloads: 0

UDK: 621.382
Publication type: Scientific article
Source lang: Russian
DOI: 10.24151/1561-5405-2026-31-4-438-447
RISC id: WOJEBR

Download: File not found (995.40 Kb) JATS XML