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Viktor B. Yakovlev

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119334, Moscow, Leninsky Ave, 32A)
Dr. Sci. (Phys.-Math.), Prof., Chief Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119334, Moscow, Leninsky Ave, 32A)

Vladimir V. Bardushkin

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16a, bld. 11)
Dr. Sci. (Phys.-Math.), Assoc. Prof. of the Institute of Physics and Applied Mathematics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Chief Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16a, bld. 11)

Igor V. Lavrov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Assoc. Prof., Prof. of the Institute of Physics and Applied Mathematics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Senior Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16a, bld. 11)

Владимир Николаевич Маршалов

Bain Aleksandr Mikhaylovich

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