Cand. Sci. (Phys.-Math.), Senior Engineer, Shared Facilities Center «MST&ECB», National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Director of the Center for Collective Use “Microsystem Technology and Electronic Component Base“, Assoc. Prof. of the Institute of Integrated Electronics named after Academician K. A. Valiev, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)