National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); “M-Soft” LLC (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5)
PhD student of the Institute of Integrated Electronics named after Academician K. A. Valiev, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Engineer, “M-Soft” LLC (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)