Persons
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
Menu button
Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
home
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
Search
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Persons
Elektronika
Persons
PhD student of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Article author
Turn
maskless lithography
adaptive optics
predictive control
thermal and vibrational disturbances
digital micromirror device
DMD
LQR
Ask filters
LQR-based predictive correction of dynamic distortions in maskless lithography
Counter: 42 | Comments : 0