Institute of Problems of Microelectronics Technology and Special Clean Materials of the Russian Academy of Sciences, Russia, 142432, Chernogolovka, Akademik Osipyan st., 6
Cand. Sci. (Phys.-Math.), Head of the Scanning Electron Microscopy Laboratory, Institute of Problems of Microelectronics Technology and Special Clean Materials of the Russian Academy of Sciences (Russia, 142432, Chernogolovka, Akademik Osipyan st., 6)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; JSC NPP ESTO, Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1
Master's degree student of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Head of the Production Preparation Department, JSC NPP ESTO (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Assistant, Training Master, PhD student of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; JSC NPP ESTO, Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1
PhD student of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Head of the Vacuum Spraying Equipment Department, JSC NPP ESTO (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 1)