Persons
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
Menu button
Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
home
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
Search
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Persons
Elektronika
Persons
Assistant, Training Master, PhD student of the Institute of Micro Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Article author
Turn
magnetron sputtering device
MSD
magnetron discharge
magnetic field simulation
rotating magnetic system
magnetron sputtering
physical vapor deposition
Ask filters
Simulation of magnetic systems of magnetron sputtering devices
Counter: 393 | Comments : 0