Р. N. Lebedev Physical Institute of the Russian Academy of Sciences, Russia, 119991, Moscow, Leninsky ave., 53
Junior Scientific Researcher of the Laboratory of New Materials for IR Photonics, Р. N. Lebedev Physical Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky ave., 53)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Engineer of the Research Laboratory of Electron Microscopy, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Национальный исследовательский университет «МИЭТ», Россия, 124482, г. Москва, г. Зеленоград, пл. Шокина, 1
PhD student, Assistant of the Institute of Microdevices and Control Systems, National Research University of Electronic Technology (Russia, 124482, Moscow, Zelenograd, Shokin sq., 1)