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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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PhD student of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Article author
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metallization
tungsten
tungsten alloys
rhenium effect
electromigration
mechanical properties
adhesion
titanium nitride
chemical deposition
high aspect ratio
metal contacts
relief surface
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Multilevel metallization of high-temperature silicon IС based on tungsten. Physics and technology. Review
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Investigation of the effect of plasma treatment on the properties of titanium nitride thin films formed by chemical vapor deposition
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