Dr. Sci. (Eng.), Assoc. Prof., Head of the Information and Measuring Equipment and Metrology Department, Penza State University (Russia, 440026, Penza, Krasnaya st., 40)
Master Student of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Deputy director by scientific part, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky Prospect, 32A)