Persons
PhD student of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Researcher of the Laboratory of Radiation Stimulated Processes, Institute of Microelectronics Tecnology and High Purity Materials Russian Academy of Sciences (Russia, 142432, Chernogolovka, Academician Ossipyan st., 6)
Dr. Sci. (Phys.-Math.), Prof., Chief Researcher of the Laboratory of Radiation Stimulated Processes, Institute of Microelectronics Tecnology and High Purity Materials of Russian Academy of Sciences (Russia, 142432, Chernogolovka, Academician Ossipyan st., 6)
Dr. Sci. (Eng.), Prof. of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Technologist, Engineer, JSC «Pluton» (Russia, 105120, Moscow, N.Syromiatnicheskaya st., 11)