Persons

Сорокин Дмитрий Владимирович
Engineer of the Structural Analysis and Metrology Department, Institute of Nanotechnology and Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)

Article author

124498, Moscow, Zelenograd, Bld. 1, Shokin Square, MIET, editorial office of the Journal "Proceedings of Universities. Electronics", room 7231

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