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The need of using the highly sensitive methods and means of the agent purity control in no waste technologies has been shown. The quality assessment criteria of the agents being used have been chosen, and the methods and means of the control have been determined. The methods and means for the purity control of agents in the no waste technologies have been suggested.

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The need of using the highly sensitive methods and means for the agent purity control in the non-waste technologies has been shown. The quality assessment criteria of the agents being used have been chosen, and the methods and means of the control have been determined. An original complex of the methods and means of the agent purity control, approved in current microelectronic manufacturing processes, has been suggested.

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