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Лемешко Сергей Владимирович

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The results of the studies on the scanning electrical-conductivity Transport Properties have been shown. The correlation of the required pressing force on the conductive cantilever to the surface, which provides a close contact with the test sample, with the material hardness and the thickness of the cantilever conductive coating, has been revealed. It has been shown that while investigating at higher values the potential difference on one hand, it is necessary to take into account the possible effect of the conductive coating material redistribution from the cantilever to the sample surface, on the other hand- the ability to provide the higher resolution while investigating the sample topography by conductive cantilever.

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The data on the peculiarities in formation on the surface of solid bodies of the dielectric mask, modulated by thickness, based on local anodic oxidation, have been presented. This has been achieved due to procedure of changing the voltage impulse parameters in the course of scanning according to the specified pattern of super-thin oxidized metal film. It has been shown that the process expands the capabilities of the local anodic oxidation for nanotechnologies in the functional electronics.

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