Cand. Sci. (Eng.), Head of the Thin Film Deposition Laboratory of JSC «Angstrem» (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, build. 3), Senior Lecturer of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Russia, Moscow, Zelenograd, Shokin sq., 1)