Persons

The possibility of using the macroscopic laws of (classical) thermohydrodynamics and its space-time limitations in modeling heat transfer from micron-sized MEMS micromirror elements of different geometry has been discussed. The main objectives of the modeling is to determine the performance of MEMS micromirror and the direction of ways to optimize these parameters. An example of practical testing of heat transfer model of thermo-mechanical actuator, which is a part of the micromirror MEMS, has been provided. The modelling results have been justified by the adequacy with the experimental testing.

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The results of investigation and development of the characteristics of the micromirror element, driven by a thermal microactuator, have been presented. It has been shown that for calculating the micromirror element deflection it is crucial to take into consideration the temperature distribution along the element length. The superheat temperature calculation has been executed, the effective superheat temperature has been determined, as well as the comparison with the experimental data has been performed.

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