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Proceedings of universities. Electronics: Electronics

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Nikita M. Somov

National Research University of Electronic Technology, Moscow, Russia; SMC “Technological Centre”, Moscow, Russia
PhD student of the Institute of Integrated Electronics named after Academician K. A. Valiev, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Process Engineer of the Plasma Chemical Processes Section of the Pilot Production, RPC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Ilya V. Potapenko

National Research University of Electronic Technology, Moscow, Russia; SMC “Technological Centre”, Moscow, Russia
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Technician of the Plasma Chemical Processes Section of the Pilot Production, SMC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Rustem A. Sharipov

National Research University of Electronic Technology, Moscow, Russia
Engineer of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Vladislav D. Gromov

National Research University of Electronic Technology, Moscow, Russia
Laboratory Assistant of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Maxim E. Shiryaev

National Research University of Electronic Technology, Moscow, Russia
Student, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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