Persons

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The results of studying the field emission properties of various conductors show the perspective of their use in the devices of microelectronics, X-ray tubes and light sources. For smooth conductor surfaces with an electron work function of about 2 to 5 eV, the electric field, at which an insignificant emission appears, is extremely high (about 107 V/cm), which creates certain limitations on the methods of the cathode formation. The existing methods of obtaining the cathodes with the low values of field permit to create the device structures, complying with the requirements of the developers of the systems. Therefore, in connection with this studying the methods of creating auto-emission cathodes of large area with homogeneous emission properties of the working surface and low operating voltages (<1 keV) is actual. In the paper the Spindt cathode with an amount of silicon micro-tips up to 6000 and the packing density 0f 1×10 cm has been studied. By an electric arc method the arc of titanium and carbon nitride films was deposited on the micropoint. It has been shown that the cathode has low emission uniformity due to the problem of reproducing the micro-points of the same shape and size. A cathode has been constructed on the basis of a microchannel plate with 6µ diameter channels, inside of which the graphite-like nanostructures were formed by the electric arc method. It has been found that as a result of the enhancement of the electron flux in the channel of the multichannel plates it is possible to significantly reduce the operating voltage (<1 keV) and to obtain a high emission uniformity at the maximum permissible value of the output current.

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