Persons

Some features of the 3D silicon structures formation by locally formation of porous silicon as a sacrificial layer have been studied. It has been formed by metal-assisted chemical etching of a single crystal wafer of Si with silver films (50 and 100 nm) as a catalyst. The influence of ionic Ag mass transfer, caused by the temperature gradient, on the surface morphology of the formed structure according to the linear size of the mask-catalyst has been determined.

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A model of the nucleation thermodynamics, which takes into account the surface tension value, has been developed. The experiments on formation of the iron clusters formed during the process of ferrocene clusters pyrolysis at various temperatures have been conducted. Based on the theoretical and experimental data the methods for determining the temperature dependence of the surface tension of nano-dimensional clusters have been developed, and the influence of this parameter on the size distribution of clusters has been shown.

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The thermodynamics of the metal nanocluster formation has been developed. An expression for the distribution function of clusters by sizes depending on their production condition has been obtained. It has been shown that the surface tension plays an important role in the cluster formation. The surface tension coefficient value for the iron clusters at 950°C has been found.

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The results of the investigated sensory properties of the zinc oxide films (ZnO), obtained by the sol-gel technology, have been presented. It has been shown that the variation of the films resistance during the repeated thermal cycling is in the temperature range of 50 - 500 °C, under conditions of the different relative humidity it is (7.5 - 90%) when exposed to the nitrogen oxides (NO and NO).

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