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Elena S. Kuznetsova

“Submicron Research Institute” JSC, Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 2; National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Leading Design Engineer, “Submicron Research Institute” JSC (Russia, 124498, Moscow, Zelenograd, Georgievsky ave., 5, bld. 2), PhD student of the Institute of Micro-Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Nikita M. Zhilo

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Engineer of the Institute of Biomedical Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Alexander A. Baranov

Central Scientific-Research Institute of Chemistry and Mechanics, Russia, 115487, Moscow, Nagatinskaya st., 16a
Cand. Sci. (Eng.), Head of the Laboratory, Central Research Institute of Chemistry and Mechanics (Russia, 115487, Moscow, Nagatinskaya st., 16a)

Paing Soe Thu

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Andrey P. Solodovnikov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Institute of Micro-Devices and Control Systems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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