Persons
Alexey A. Sherchenkov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Irina V. Sagunova
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Eng.), Measurement Specialist, R&D Center of Thin Film Technologies in Energetics (Russia, 194021, St. Petersburg, Polytechnicheskaya st., 28)
PhD Student, Junior Researcher of the Institute of Perspective Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Lead Engineer, National Research University of Electronic Technology Core facilities center «MEMS and electronic components» (Russia, 124527, Moscow, Zelenograd, Solar Alley, 6)