The results of the study on the local electrochemical deposition from chloride electrolyte have been presented and the permalloy films NiFe with magnetic properties, similar to 3-d models with the uniform thickness and with low mechanical stresses without high-temperature annealing have been obtained. The dependencies of the congruent deposition velocity on the current density have been presented. The peralloy films are designed to enhance the magnetic field in the magneto-semiconductor microsystems.
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