Persons
Mikhail I. Usov
“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Yakov I. Putilov
“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Vitaly D. Kovalev
Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
Andrey M. Sokolov
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3