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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Master’s degree student of the Institute of Physics and Applied Mathematics, Engineer of the Research Laboratory of Electron Microscopy, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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ion implantation
silicon
xenon
digital image processing
electron diffraction
Monte Carlo technique
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Electron microscopy studies of crystalline silicon after low-energy xenon ion irradiation
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