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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Assistant of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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Line Edge Roughness
LER effect
photoresist mask edge roughness
integrated circuits
ICs
photonic integrated circuits
PICs
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Causes of LER effect occurrence and methods for its minimization in IC manufacturing
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