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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Head of the Physico-Analytical Research Group, Angstrem JSC (Russia, 122460, Moscow, Zelenograd, Shokina Square, 2, bld. 3)
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tungsten films
conductive cantilever
atomic force microscopy
electric force microscopy
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Study of the formation and thermal treatment of conductive tungsten-based films for electric force microscopy cantilevers
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