Persons

Кочергин Михаил Дмитриевич
PhD student of the Institute of Nano- and Microsystem Engineering, Design Engineer of the Scientific Research Laboratory “Advanced technologies of 3D Microsystems Enclosure and Production”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Article author

124498, Moscow, Zelenograd, Bld. 1, Shokin Square, MIET, editorial office of the Journal "Proceedings of Universities. Electronics", room 7231

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