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Julia V. Chumachenko

National Research University of Electronic Technology, Moscow, Russia
Master’s degree student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Dmitry V. Pebalk

Kabardino-Balkarian State University named after H. M. Berbekov, Nalchik, Russia
Cand. Sci. (Chem.), Senior Engineer of the Institute of Nano- and Microsystem Engineering, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1),

Darya A. Dronova

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Eng.), Senior Lecturer of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Roman L. Volkov

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Phys.-Math.), Assoc. Prof. of theInstitute of Physics and Applied Mathematics, Senior Researcher of the Electron Microscopy Research Laboratory, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Mikhail D. Kochergin

National Research University of Electronic Technology, Moscow, Russia
PhD student of the Institute of Nano- and Microsystem Engineering, Design Engineer of the Scientific Research Laboratory “Advanced technologies of 3D Microsystems Enclosure and Production”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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