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Olga B. Chukanova

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Engineer of the Scientific Research Laboratory “Element Base of Nanoelectronics”, Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Daulet Zhangireyev

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7
Master’s degree student of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Engineer of the Integrated Circuits Department, SMC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Nikita А. Trunilin

Saratov National Research State University named after N. G. Chernyshevsky, Russia, 410012, Saratov, Astrakhanskaya st., 83
Student, Saratov State University (Russia, 410012, Saratov, Astra-khanskaya st., 83)

Alexey V. Klekovkin

Р. N. Lebedev Physical Institute of the Russian Academy of Sciences, Russia, 119991, Moscow, Leninsky ave., 53
Junior Scientific Researcher of the Laboratory of New Materials for IR Photonics, Р. N. Lebedev Physical Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky ave., 53)

Vadim A. Sazonov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Engineer of the Research Laboratory of Electron Microscopy, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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