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Margarita D. Kruzhalina

National Research University of Electronic Technology, Moscow, Russia
Student, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Ekaterina S. Migunova

National Research University of Electronic Technology, Moscow, Russia Institute of Nano-technology of Microelectronics of the Russian Academy of Sciences, Moscow, Russia
Senior Lecturer of the Institute of Physics and Applied Mathematics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

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Сулимин Александр Дмитриевич

Мочалов Алексей Иванович

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