Persons
doctor of physico-mathematical sciences, professor, chief of laboratory of Radiation Methods of Technology and Analysis, National Research University of Electronic Technology, leading researcher (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), laboratory X-ray Methods of Nanostructure Diagnostics, P.N. Lebedev Physical Institute of Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky prosp., 53)
senior metrology applications engineer SC «Angstrem-Т» (124498, Moscow, Zelenograd, Georglyevskiy prosp., 7), PhD student of the Quantum Physics and Nanoelectronics Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
project manager, «AS & PP» Limited Liability Company (Russia, 124460, Moscow, Zelenograd, Panfilovskiy pr., 10)
student of the Integrated Electronics Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), junior researcher, «AS & PP» Limited Liability Company (Russia, 124460, Moscow, Zelenograd, Panfilovskiy pr., 10)
phD of technical sciences, doctoral student, assistant of the Radioelectronics Department, Tula State University (Russia, 300012, Tula, Lenin pr., 92)