National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Angstrem JSC, Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Head of the Deposition Laboratory, Angstrem JSC (Russia, 124460, Moscow, Zelenograd, Shokin sq., 2, bld. 3)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Assoc. Prof. of the Institute of Physics and Applied Mathematics, Senior Scientific Researcher of the Research Laboratory of Electron Microscopy, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)