National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Dr. Sci. (Eng.), Prof. of the of Integrated Electronics and Microsystems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dr. Sci. (Eng.), Senior Engineer of the Scientific and Educational Center “Probe Microscopy and Nanotechnology”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
(1941–2025) Dr. Sci. (Phys.-Math.), Prof., Chief Researcher, Head of the Scientific and Educational Center “Probe Microscopy and Nanotechnology”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Engineer of the Scientific and Educational Center “Probe Microscopy and Nanotechnology”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)