The results of the studies of a nanostructure array formation on the surface of nanocrystalline SnS films during the inductively coupled argon plasma treatment have been presented. Using the methods of the electron microscopy and energy dispersive X-ray the parameters of the nanostructures and their growth characteristics have been described. It has been shown that the growth of tin sulfide nanostructures has a complex character and takes place with the participation of the self-assembled catalytic Sn droplets according to the “vapor-liquid-solid” mechanism.
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